Presentation + Paper
28 October 2021 Faster and more accurate measurement of surface radius
Robert Smythe, Thomas Stalcup, Allen Hinojosa
Author Affiliations +
Proceedings Volume 11889, Optifab 2021; 118891K (2021) https://doi.org/10.1117/12.2613491
Event: SPIE Optifab, 2021, Rochester, New York, United States
Abstract
Spectrally Controlled Interferometry measures surface form and radius in one measurement. Earlier results demonstrated ~30 PPM uncertainty, which rivals the standard DMI radius measurement, from a simple proof-of-concept test without careful compensation for the ambient environment. Results showing improved uncertainty through better calibration including environmental compensation are presented.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert Smythe, Thomas Stalcup, and Allen Hinojosa "Faster and more accurate measurement of surface radius", Proc. SPIE 11889, Optifab 2021, 118891K (28 October 2021); https://doi.org/10.1117/12.2613491
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Confocal microscopy

Calibration

Interferometry

Precision mechanics

Environmental sensing

Optics manufacturing

Phase measurement

RELATED CONTENT

Absolute calibration of flats for densely sampled data
Proceedings of SPIE (September 08 1995)
Assistance system for optical sensors
Proceedings of SPIE (June 17 2009)
Case against optical gauge block metrology
Proceedings of SPIE (September 30 1998)

Back to Top