Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Linyu Yan; Dong Yang; Qihuang Gong; Yan Li

doi:10.1117/12.2602350

9 October 2021 Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering

Linyu Yan, Dong Yang, Qihuang Gong, Yan Li

Author Affiliations +

Proceedings Volume 11892, Advanced Laser Processing and Manufacturing V; 1189210 (2021) https://doi.org/10.1117/12.2602350
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

Femtosecond laser direct writing via two-photon polymerization (TPP), which utilizes high intensity laser induced two-photon absorption to initiate polymerization, is a promising approach for 3D microstructure fabrication especially micro-optical devices. The traditional point-by-point direct writing TPP has high spatial resolution but usually timeconsuming[1], thus it is hard to fabricate large structures or arrays. Recently, several solutions have been proposed to facilitate the polymerization, for instance, the multi-focus generation for parallel processing but the interference between foci limits their density[2], the multi-beam interference for specific periodic structures[3], and the focal field engineering[4,5]. In this work, we fabricate arbitrary 3D structures with the focal field engineering (FFE) by inversely retrieving the incident beam profile from the target focal field to speed up the polymerization of the microstructures. Moreover, we anneal the structure as post heat treatment to improve its smoothness of the surface.

Citation Download Citation

Linyu Yan, Dong Yang, Qihuang Gong, and Yan Li "Rapid two-photon polymerization of arbitrary 3D microstructure with femtosecond laser 3D focal field engineering", Proc. SPIE 11892, Advanced Laser Processing and Manufacturing V, 1189210 (9 October 2021); https://doi.org/10.1117/12.2602350

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