High-brightness LDP source for EUVL mask inspection

Kazuya Aoki; Yoshihiko Sato; Yusuke Teramoto; Takahiro Shirai; Shunichi Morimoto; Hidenori Watanabe

doi:10.1117/12.2601995

23 August 2021 High-brightness LDP source for EUVL mask inspection

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe

Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology; 119080I (2021) https://doi.org/10.1117/12.2601995
Event: Photomask Japan 2021, 2021, Online Only

Abstract

The Laser-assisted discharge-produced (LDP) plasma EUV source was developed as a light source for actinic mask inspection and beamline application. Since the focused laser irradiation is used to ignite the discharge, the LDP plasma has a unique feature of high brightness and high power. It can be operated at the frequency of up to 10 kHz generating <200 W/mm2/sr in-band EUV brightness at plasma. The source reliability is also proven in the field as a source for actinic mask inspection. In the paper, the key performances of the LDP source will be discussed.

Citation Download Citation

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, and Hidenori Watanabe "High-brightness LDP source for EUVL mask inspection", Proc. SPIE 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology, 119080I (23 August 2021); https://doi.org/10.1117/12.2601995

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