Research on a sensitive structure with high sensitivity for MOEMS application

Meng Zhang; Shaoyu Zhao; Xiaoyan Hu

doi:10.1117/12.2605698

1 November 2021 Research on a sensitive structure with high sensitivity for MOEMS application

Meng Zhang, Shaoyu Zhao, Xiaoyan Hu

Proceedings Volume 12057, Twelfth International Conference on Information Optics and Photonics; 120571X (2021) https://doi.org/10.1117/12.2605698
Event: Twelfth International Conference on Information Optics and Photonics, 2021, Xi'an, China

Abstract

A sensitive structure with built-in T-shaped beams was studied in the paper to achieve high fill-factor and high sensitivity for Micro-Optical-Electro-Mechanical-Systems (MOEMS) application. The silicon proof mass in the structure was supported by four identical T-shaped beams, which were distributed symmetrically and orthogonally in the plane to suppress the in-plane cross coupling. In particular, the T-shaped beam was composed of three parts: stress releasing structure, cantilever and flexible linking structure. The stress releasing structure was used to avoid torsion or warpage caused by residual stress and improve the sensitivity at the same time. The mechanical properties were studied systematically by finite element simulation. The stiffness in z-axis direction was much lower than the in-plane stiffness of the structure, indicating high z-axis sensitivity and small cross coupling error. The reason for high sensitivity of the sensitive structures was fully illustrated by comparing the displacement responses for different beams. The simulation results indicated that the sensitivity was improved more than twice because the stress releasing structure and flexible linking structure reduced the axial stress caused by deflection. Finally, the optical performances were also evaluated in terms of bandwidth and tuning range when used for MEMS Fabry Perot Optical Tunable Filter. The wavelength tuning range achieved about 1.8μm in long-wave infrared waveband by controlling the applied voltage.

Citation Download Citation

Meng Zhang, Shaoyu Zhao, and Xiaoyan Hu "Research on a sensitive structure with high sensitivity for MOEMS application", Proc. SPIE 12057, Twelfth International Conference on Information Optics and Photonics, 120571X (1 November 2021); https://doi.org/10.1117/12.2605698

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