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To make a low-cost and effective infrared polarizer, we designed a mid-infrared polarizer with double-sided silica anti-reflection films. Double-sided silica was oxidized on a silicon substrate. Then, micro gratings were fabricated on silica by using soft nanoimprint lithography and metal thermal evaporation process. The transverse magnetic wave (TM) transmittance exceeds 70% in the wavelength range of 2.56-2.95μm and 3.93-4.97μm. The extinction ratio exceeds 20dB in 2.5-5.5μm band. The mid-infrared polarizer has potential applications in fields such as polarization detection, communication, and spectral analysis.
Xiangwei Zeng,Xingsheng Hao,Yahong Li,Jinkui Chu,Xiangnan Qiao, andRan Zhang
"A low-cost mid-infrared polarizer with double-sided silica anti-reflection films fabricated using nanoimprint", Proc. SPIE 12061, AOPC 2021: Infrared Device and Infrared Technology, 1206103 (24 November 2021); https://doi.org/10.1117/12.2600907
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Xiangwei Zeng, Xingsheng Hao, Yahong Li, Jinkui Chu, Xiangnan Qiao, Ran Zhang, "A low-cost mid-infrared polarizer with double-sided silica anti-reflection films fabricated using nanoimprint," Proc. SPIE 12061, AOPC 2021: Infrared Device and Infrared Technology, 1206103 (24 November 2021); https://doi.org/10.1117/12.2600907