The influence of pressure groove on micro jet machining

Lianmin Yin; Yifan Dai; Shuai Xue; Zhifan Lin; Bing Yang; Yongbin Wang

doi:10.1117/12.2604493

13 December 2021 The influence of pressure groove on micro jet machining

Lianmin Yin, Yifan Dai, Shuai Xue, Zhifan Lin, Bing Yang, Yongbin Wang

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 1207112 (2021) https://doi.org/10.1117/12.2604493
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

Jet polishing plays an important role in ultra-precision machining. In this paper, the effects of slotted and slotless nozzles on micro jet machining are investigated. The pressure distribution and magnitude of the two nozzles on the workpiece were first calculated by finite element simulation software. Then a set of comparative tests were conducted on two single crystals of silicon. The results showed that the pressure distribution of the slotless nozzle was more uniform compared to the slotted nozzle, and the pressure value of the slotless nozzle on the surface of the workpiece was greater. In addition, the slotless nozzle is more capable of improving the surface roughness of the workpiece in the same time.

Citation Download Citation

Lianmin Yin, Yifan Dai, Shuai Xue, Zhifan Lin, Bing Yang, and Yongbin Wang "The influence of pressure groove on micro jet machining", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 1207112 (13 December 2021); https://doi.org/10.1117/12.2604493

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