Paper
30 January 2022 Development and research of a micromechanical accelerometer sensor element
V. V. Kalugin, E. S. Kochurina, L. R. Boev, S. A. Anchutin, A. S. Timoshenkov
Author Affiliations +
Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570G (2022) https://doi.org/10.1117/12.2623136
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation
Abstract

This paper describes the design of the developed sensing element (SE) of a micromechanical accelerometer (MMA). Devices using SE data are used to measure acceleration (apparent). SE MMA is manufactured using a technology based on operations that make up the technology of semiconductors, mainly silicon, devices, and integrated circuits. But it has a number of significant features and problems that have to be taken into account when using typical technological processes for specific micromechanical structures and systems.

The paper considers the process of anisotropic etching of silicon, which makes it possible to form a three-dimensional SE structure. A numerical estimate of the errors arising during the formation of protrusions that form the gap is given. And even the influence of these errors on the output parameters of the MMA.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. V. Kalugin, E. S. Kochurina, L. R. Boev, S. A. Anchutin, and A. S. Timoshenkov "Development and research of a micromechanical accelerometer sensor element", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570G (30 January 2022); https://doi.org/10.1117/12.2623136
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KEYWORDS
Etching

Silicon

Chemical elements

Anisotropic etching

Microelectromechanical systems

Oxides

Manufacturing

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