Modeling of thermal stresses in passivation layers of InSb infrared detector

Dongying Wu; Wei Liu; Wen Wang; Yanqiu Lyu

doi:10.1117/12.2619717

27 March 2022 Modeling of thermal stresses in passivation layers of InSb infrared detector

Dongying Wu, Wei Liu, Wen Wang, Yanqiu Lyu

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121690H (2022) https://doi.org/10.1117/12.2619717
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Due to a big difference between the temperature of the passivation film preparation and the temperature when the device is used, the stress will appear in the layers, and the existence of stress will affect the spectral performance of the InSb infrared detector. SiO₂ or SiN_x passivation film for the InSb device is prepared at 130°C and is used at 77K, which the stress is seriously affect the device performance due to the mismatch. We simulate the stress between different thickness of SiO2 and SiNx single-layer, SiO₂/SiN_x double-layer and SiO₂/SiN_x/SiO₂/SiN_x multilayer passivation films on the InSb substrate. The bending strain of the SiO₂/SiN_x double-layer passivation films is the smallest. Combined the formula of infrared transmittance, we get less strain when the single-layer SiO₂ thickness is 0.78 μm or the single-layer SiNx thickness is 0.54 μm. When the thicknesses of SiO₂ and SiN_x are 0.1 μm and 0.42μm respectively for the double-layer passivation film system, the external transmittance is the largest and the strain is smallest.

Citation Download Citation

Dongying Wu, Wei Liu, Wen Wang, and Yanqiu Lyu "Modeling of thermal stresses in passivation layers of InSb infrared detector", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121690H (27 March 2022); https://doi.org/10.1117/12.2619717

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KEYWORDS

Multilayers

Infrared detectors

Thermal modeling

Infrared radiation

Transmittance

Coating

Instrument modeling

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