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27 March 2022 Silicon photonic integrated FMCW coherent LIDAR receiving chip
Lijun Yang, Xiaoyan Hu, Bin Li, Jing Cao, Jun Cao
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Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121691H (2022) https://doi.org/10.1117/12.2622264
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China
Abstract
We present the demonstration of an integrated Frequency Modulated Continuous Wave (FMCW) coherent solid-state LIDAR (Light detection and ranging) on a silicon platform. The grating coupler array, the multimode interferometer (MMI) and the balanced detector array are implemented on one chip. The silicon-based grating coupler array receives the signal light and couples it into the silicon-based waveguide. Then the signal light is coherently beaten against the local light in the MMI, whose two outputs with 180° phase difference are detected by the balanced germanium (Ge) photodetector array. An external readout circuit composed of transimpedance amplifiers (TIAs) and bandpass filters is used to convert the photocurrent to voltage, from which the measured distance can be obtained through fast Fourier transform (FFT) and spectrum analysis. Here, on-chip space distance measurement was performed within the eye-safe 1550 nm band. Our prototype, fabricated entirely in a 300 mm wafer facility, has the advantages of low-cost, high integration and performance, which may enable extensive application of LIDARs in consumer products, such as selfdriving cars, drones, and robots.
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Lijun Yang, Xiaoyan Hu, Bin Li, Jing Cao, and Jun Cao "Silicon photonic integrated FMCW coherent LIDAR receiving chip", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121691H (27 March 2022); https://doi.org/10.1117/12.2622264
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KEYWORDS
LIDAR
Distance measurement
Silicon
Photodetectors
Silicon photonics
Germanium
Waveguides
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