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The modified Fizeau interferometer that allows to diagnose plane and spherical optical elements with the diameter ranging from 10 to 100 mm is discussed. The modified method of interference patterns reconstruction based on reference lines is described. Two algorithms — the algorithm of 4th order polynomial smoothing and the algorithm of fast Fourier transform are implemented. The modified method allowed to increase the reliability of interferometric pattern reconstruction and suppress the influence of incoming noise. Accuracy of the measurements is about λ/10 (λ=0.63 um).
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Ilya Galaktionov, Julia Sheldakova, Vladimir Toporovsky, Alexis Kudryashov, "Modified Fizeau interferometer with the polynomial and FFT smoothing algorithm," Proc. SPIE 12223, Interferometry XXI, 122230T (3 October 2022); https://doi.org/10.1117/12.2632181