Reactive ion etching and deep reactive ion etching processes

YiHan Wu; HaiLin He

doi:10.1117/12.2634681

25 April 2022 Reactive ion etching and deep reactive ion etching processes

YiHan Wu, HaiLin He

Proceedings Volume 12244, 2nd International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2022); 1224406 (2022) https://doi.org/10.1117/12.2634681
Event: 2nd International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2022), 2022, Guilin, China

Abstract

Semiconductor technology is a new technology that has only begun to develop in recent decades, but after just a few decades of development, it has become one of the largest industries in the world today, and it exists in many products in our daily lives. In the last few years, the demand for semiconductors surged, even in automobiles, computers and other industries. Due to the shortage of semiconductor chips, a chain shortage effects are caused in many other fields. Therefore, advanced semiconductor technology is very urgent. In semiconductor technology, etching technology accounts for about one-third of the total process capital cost and a large amount of time cost. The reactive ion etching and deep reactive ion etching in this paper are the most advanced techs among all etching technologies today. This paper first explained the mechanisms of the two technologies, and analyzed etching performance with various influencing factors.

Citation Download Citation

YiHan Wu and HaiLin He "Reactive ion etching and deep reactive ion etching processes", Proc. SPIE 12244, 2nd International Conference on Mechanical, Electronics, and Electrical and Automation Control (METMS 2022), 1224406 (25 April 2022); https://doi.org/10.1117/12.2634681

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available