A compact ring modulator with very large extinction ratio and high quality factor fabricated in AIM photonics technology at Albany Nanotech Complex

M. Rakib Uddin; Jin Wallner; Amit Dikshit; M. Jobayer Hossain; Yukta Timalsina; Nicholas M. Fahrenkopf; David L. Harame

doi:10.1117/12.2648994

14 March 2023 A compact ring modulator with very large extinction ratio and high quality factor fabricated in AIM photonics technology at Albany Nanotech Complex

M. Rakib Uddin, Jin Wallner, Amit Dikshit, M. Jobayer Hossain, Yukta Timalsina, Nicholas M. Fahrenkopf, David L. Harame

Author Affiliations +

Proceedings Volume 12417, Optical Components and Materials XX; 124170W (2023) https://doi.org/10.1117/12.2648994
Event: SPIE OPTO, 2023, San Francisco, California, United States

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Abstract

In this work, we demonstrate a compact pn junction ring modulator with very large extinction ratio and high quality factor. The modulator consists of a 5-μm radius ring and a single-bus straight waveguide. Both the ring and straight waveguides have a width of 480 nm and heigh of 220 nm. The waveguides are rib-structured and the rib thickness is 110 nm with a slab thickness of 110 nm from a 300mm wafer with 220-nm silicon-on-insulator (SOI) thickness. A 100-nm gap is designed between the rib ring and the bus waveguides. The modulator has three nominal doping levels with concentrations of 10¹⁸, 10¹⁹, and 10²⁰ cm^-3 for the core, slab, and the contact areas, respectively. The device is fabricated using the American Institute for Manufacturing integrated Photonics (AIM Photonics) Multi-Project Wafer (MPW) service. It is tested using the AIM Photonics inline vertical gratting coupled automated tool with a tunable light source that has wavelengths ranging from 1485 nm to 1590 nm and a wavelength resolution of 60 pm. The fabricated 5-μm radius ring modulator exhibits high quality output with a very large extinction ratio of 29 dB over a broad wavelength spectrum of about 100 nm. The device has a very wide free spectral range (FSR) of about 19 nm.

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M. Rakib Uddin, Jin Wallner, Amit Dikshit, M. Jobayer Hossain, Yukta Timalsina, Nicholas M. Fahrenkopf, and David L. Harame "A compact ring modulator with very large extinction ratio and high quality factor fabricated in AIM photonics technology at Albany Nanotech Complex", Proc. SPIE 12417, Optical Components and Materials XX, 124170W (14 March 2023); https://doi.org/10.1117/12.2648994

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