Dynamical properties and performances of ß-Ga2O3 UVC photodetectors of extreme solar blindness

Luc Damé; Lucile Conan; Carlo De Santi; Alessandro Caria; Matteo Buffolo; Matteo Meneghini; Pierre Maso; Clément Dias; Halima Ghorbel; Pierre Maso; Mustapha Meftah; Philippe Bove; V. Sandana; David Rogers; Ferechteh Teherani

doi:10.1117/12.2651204

16 March 2023 Dynamical properties and performances of β-Ga₂O₃ UVC photodetectors of extreme solar blindness

Luc Damé, Lucile Conan, Carlo De Santi, Alessandro Caria, Matteo Buffolo, Matteo Meneghini, Pierre Maso, Clément Dias, Halima Ghorbel, Pierre Maso, Mustapha Meftah, Philippe Bove, V. Sandana, David Rogers, Ferechteh Teherani

Author Affiliations +

Proceedings Volume 12422, Oxide-based Materials and Devices XIV; 1242207 (2023) https://doi.org/10.1117/12.2651204
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

There is a surge in interest for the ultra wide bandgap (Eg ~ 4.9 eV) semiconductor gallium oxide (Ga₂O₃). A key driver for this boom is that single crystal wide area bulk β-Ga₂O₃ substrates have become commercially available and that a variety of methods have been shown to give high quality epitaxial growth. Amongst a whole range of potential applications (power/switching electronics, solar transparent electrodes, etc.) extreme solar blindness photodetectors in β- Ga₂O₃, the more stable monoclinic phase of Ga₂O₃, offers the most exciting perspectives for deep ultraviolet observations below 250 nm. We present an overview of the complete realization process (epitaxy, photolithography, singulation and packaging), and space qualification (to TRL8) of a series of β-Ga2O3 photodetectors We insist on their remarkable solar blindness performance (factor 1000 or more between peak responsivity around 215-220 nm and 250 nm) and dynamical properties (rise and fall times < 5 ms), along with their enhanced responsivity, excellent thermal behaviour and radiation hard properties. 4 of these detectors have been integrated on the INSPIRE-SAT 7 nanosatellite expected to be launched in April 2023 to reach the TRL9 "demonstrated in flight" qualification.

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Luc Damé, Lucile Conan, Carlo De Santi, Alessandro Caria, Matteo Buffolo, Matteo Meneghini, Pierre Maso, Clément Dias, Halima Ghorbel, Pierre Maso, Mustapha Meftah, Philippe Bove, V. Sandana, David Rogers, and Ferechteh Teherani "Dynamical properties and performances of β-Ga₂O₃ UVC photodetectors of extreme solar blindness", Proc. SPIE 12422, Oxide-based Materials and Devices XIV, 1242207 (16 March 2023); https://doi.org/10.1117/12.2651204

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