Mask variability with extraction of SEM image contour and area measurements

Matthieu Piloto; Romain Bange; Frank Sundermann

doi:10.1117/12.2640124

1 November 2022 Mask variability with extraction of SEM image contour and area measurements

Matthieu Piloto, Romain Bange, Frank Sundermann

Proceedings Volume 12472, 37th European Mask and Lithography Conference; 124720B (2022) https://doi.org/10.1117/12.2640124
Event: 37th European Mask and Lithography Conference, 2022, Leuven, Belgium

Abstract

This paper presents contour-based methods to assess mask variability. Mask certification depends on the measurement reliability and on criteria relevance. By now, ST and its maskshop partners rely mostly on CDSEM measurements for mask certification. However, this kind of metrology has limitations and, looking at the future, we think it would be timely to search for metrology which bypass those limitations. That is why we are looking at 2D metrology ^[1], especially to area and contour measurements ^[2] on SEM images using extracted contours. Thanks to the added value of 2D metrology, we expect to assess mask variability, mask uniformity and pattern fidelity. We also take the opportunity to compare the results on two FOVs (field of view) from the images provided by mask shops. Finally, we also intend to automate the whole measurement process to make it easier to use.

Citation Download Citation

Matthieu Piloto, Romain Bange, and Frank Sundermann "Mask variability with extraction of SEM image contour and area measurements", Proc. SPIE 12472, 37th European Mask and Lithography Conference, 124720B (1 November 2022); https://doi.org/10.1117/12.2640124

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available