Research on different medium-assisted quartz material processing technology based on femtosecond laser

Hongbing Yuan; Zhihao Chen; Peichao Wu; Zhenkai Zhu; Xianfei Wang; Xiaowen Cao; Wenwu Zhang

doi:10.1117/12.2656050

9 January 2023 Research on different medium-assisted quartz material processing technology based on femtosecond laser

Hongbing Yuan, Zhihao Chen, Peichao Wu, Zhenkai Zhu, Xianfei Wang, Xiaowen Cao, Wenwu Zhang

Proceedings Volume 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022); 125071S (2023) https://doi.org/10.1117/12.2656050
Event: 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 2022, Changchun, China

Abstract

Quartz material, as an important material, is widely used in aerospace, micro-optics, microelectronics and other fields due to its high hardness and good thermal stability. With the rapid development of science and technology, the demand for the machining accuracy and machining size of quartz material is increasing. However, due to the brittleness and hardness of quartz material, the traditional machining methods have problems such as edge collapse, high roughness, and difficulty in machining small size. Femtosecond laser direct writing technology, with its super high machining accuracy, can focus on the interior of transparent material or focus on the back surface of material through transparent material to remove the material. It has become the most widely studied micromachining method in China and abroad. In this paper, we studied the different medium assisted femtosecond laser treatment of quartz, the results show that the liquid environment can effectively reduce the surface roughness of laser treatment.

Citation Download Citation

Hongbing Yuan, Zhihao Chen, Peichao Wu, Zhenkai Zhu, Xianfei Wang, Xiaowen Cao, and Wenwu Zhang "Research on different medium-assisted quartz material processing technology based on femtosecond laser", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125071S (9 January 2023); https://doi.org/10.1117/12.2656050

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