Transparent anisotropic films measurement with a polarized angle-resolved spectroscopy

Lihua Peng; Dawei Tang; Jian Wang; Long Xu; Wenlong Lu; Rong Chen; Liping Zhou

doi:10.1117/12.2666965

27 January 2023 Transparent anisotropic films measurement with a polarized angle-resolved spectroscopy

Lihua Peng, Dawei Tang, Jian Wang, Long Xu, Wenlong Lu, Rong Chen, Liping Zhou

Proceedings Volume 12550, International Conference on Optical and Photonic Engineering (icOPEN 2022); 1255024 (2023) https://doi.org/10.1117/12.2666965
Event: International Conference on Optical and Photonic Engineering (icOPEN 2022), 2022, ONLINE, China

Abstract

Polarized angle-resolved spectroscopy is introduced to measure transparent anisotropic films with back focal plane imaging by virtue of its rich information provided at various incident and azimuthal angles. The polarized angle-resolved spectroscopy provides a conoscopic interferogram and angle-resolved spectrum to deal with the complex characterization parameters of an anisotropic film, including the thickness, principal refractive index, and optical axis. Firstly, the optics model of a transparent anisotropic film is built by superpositioning the incoherent waves from the front and rear surfaces with coherency matrices formalism when the optical length is larger than the coherent length, and the incoherent issue arises. Then the optical axis of the anisotropic sample can be determined by the conoscopic interference image with the melatope, which marks zero phase difference between the ordinary and extraordinary waves. The measured angle-resolved reflectance spectrum and anisotropic interference phase are fitted to the optics model of the film with coherency matrix formalism, utilizing the Levenberg-Marquardt algorithm to calculate the thickness and dispersion principal refractive index within a single shot. The thickness and anisotropic refractive index are determined for sapphire and polyethylene terephthalate (PET) samples with our homemade polarized angle-resolved spectrometer. The thickness measurement results show that the relative error of the proposed method is less than 1.45%.

Citation Download Citation

Lihua Peng, Dawei Tang, Jian Wang, Long Xu, Wenlong Lu, Rong Chen, and Liping Zhou "Transparent anisotropic films measurement with a polarized angle-resolved spectroscopy", Proc. SPIE 12550, International Conference on Optical and Photonic Engineering (icOPEN 2022), 1255024 (27 January 2023); https://doi.org/10.1117/12.2666965

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KEYWORDS

Reflectivity

Refractive index

Spectroscopy

Reflection

Objectives

Optical coherence

Optics

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