New method of measurement on the extinction ratio of silicon photonics Mach–Zehnder IQ-modulators

Shi-Chao Zhu; Xun Lei; Sheng Yu; Luluzi Lu; Quan Cao

doi:10.1117/12.2651373

23 January 2023 New method of measurement on the extinction ratio of silicon photonics Mach–Zehnder IQ-modulators

Shi-Chao Zhu, Xun Lei, Sheng Yu, Luluzi Lu, Quan Cao

Proceedings Volume 12556, AOPC 2022: Optoelectronics and Nanophotonics; 125560Z (2023) https://doi.org/10.1117/12.2651373
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

Although silicon photonics (SiPh) has already been developed as a commercial technology, further improvements are under investigation to increase the yield in the volume production. Extinction ratio (ER) is one of the important characteristics of a SiPh Mach–Zehnder (MZ) in-phase and quadrature (IQ) modulator. Besides the chip design, waferlevel or chip-level testing becomes efficient for the ER yield improvement. Traditional method is useful in the measurement of single MZ modulators, but not accurate in that of IQ modulators. In this paper, a novel and effective ER measurement scheme for SiPh IQ-modulator is proposed, and investigated theoretically and experimentally. Compared to the convention method, our algorithm is still robust in SiPh modulator with extinction ratio larger than 45 dB, when the other child MZM is non-ideal and other noise exists. The well repeatability of the proposed algorithm is also demonstrated. The new ER measurement will be very useful in the wafer-level/chip-lever testing to increase the yield.

Citation Download Citation

Shi-Chao Zhu, Xun Lei, Sheng Yu, Luluzi Lu, and Quan Cao "New method of measurement on the extinction ratio of silicon photonics Mach–Zehnder IQ-modulators", Proc. SPIE 12556, AOPC 2022: Optoelectronics and Nanophotonics, 125560Z (23 January 2023); https://doi.org/10.1117/12.2651373

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