Versatile modulation transfer function and direct point spread function measurement with a random target method

F. Michaud

doi:10.1117/12.2675032

15 August 2023 Versatile modulation transfer function and direct point spread function measurement with a random target method

F. Michaud

Author Affiliations +

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 1261818 (2023) https://doi.org/10.1117/12.2675032
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

We show in this paper a digital random target method for measurement of Modulation Transfer Function and Point spread function locally in all the field of view of the instrument, and with a good accuracy. The point is to use a “pixel locking method” to identify point in object space with its conjugate point in the image space in pixel accuracy.

Conference Presentation

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F. Michaud "Versatile modulation transfer function and direct point spread function measurement with a random target method", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 1261818 (15 August 2023); https://doi.org/10.1117/12.2675032

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