Measurement analysis of optical micrometers with polygonal mirror-based laser scanners

Attila Tiberiu Teodorovits; Corina Mnerie; Virgil-Florin Duma

doi:10.1117/12.2665239

15 August 2023 Measurement analysis of optical micrometers with polygonal mirror-based laser scanners

Attila Tiberiu Teodorovits, Corina Mnerie, Virgil-Florin Duma

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126181W (2023) https://doi.org/10.1117/12.2665239
Event: SPIE Optical Metrology, 2023, Munich, Germany

Conference Poster

Abstract

Polygon mirror (PM)-based laser scanners are the fastest opto-mechanical scanning system. One of their most common applications is in optical micrometers for industrial applications. The aim of the present work is to study experimentally such a system from the point of view of the non-linearity of their scanning function. In this respect, we built upon the developed opto-mechanical analysis and design of PM scanning heads. Thus, testing measurements are performed regarding both the dimension and the position of the object to be measured, which is positioned between the two lenses (i.e., achromatic doublets) of a telescope positioned after the PM and preceding the system’s photodetector (PD). The measuring method is discussed, and its errors are pointed out in obtaining the object’s dimension on the direction of the scanning velocity (of the beam that sweeps the space between the telescope’s lenses perpendicular on their optical axis), using the time interval when the PD receives no laser signal because of the obscuration by the object to be measured. The energy received by the PD with the rotation of the PM is measured for objects of different diameters placed between the lenses of the telescope at different positions with regard the optical axis of the lenses.

Citation Download Citation

Attila Tiberiu Teodorovits, Corina Mnerie, and Virgil-Florin Duma "Measurement analysis of optical micrometers with polygonal mirror-based laser scanners", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126181W (15 August 2023); https://doi.org/10.1117/12.2665239

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