Free volume and viscosity effects in polymer layers: application to lithographic processes

Patrick Jean Paniez; Michel J. Pons; Olivier P. Joubert

doi:10.1117/12.20103

1 June 1990 Free volume and viscosity effects in polymer layers: application to lithographic processes

Patrick Jean Paniez, Michel J. Pons, Olivier P. Joubert

Proceedings Volume 1262, Advances in Resist Technology and Processing VII; (1990) https://doi.org/10.1117/12.20103
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Due to the numerous hydroxyl groups present in Novolaks and PHS, large amounts of free volume are created during the spin coating process. The free volume variations can be observed using plasma etching techniques along with laser interferometry. The concept of free volume allows a clearer description of the bake process. The detection of free volume implies a better understanding of its role in the various steps of the lithographic process. Several applications of this technique are presented.

Citation Download Citation

Patrick Jean Paniez, Michel J. Pons, and Olivier P. Joubert "Free volume and viscosity effects in polymer layers: application to lithographic processes", Proc. SPIE 1262, Advances in Resist Technology and Processing VII, (1 June 1990); https://doi.org/10.1117/12.20103

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