Electron storage rings as x-ray lithography sources: an overview

James B. Murphy

doi:10.1117/12.20151

1 May 1990 Electron storage rings as x-ray lithography sources: an overview

James B. Murphy

Proceedings Volume 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX; (1990) https://doi.org/10.1117/12.20151
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. To meet the need for these sources numerous groups around the world have embarked on projects to design and construct storage rings for x-ray lithography. Both conventional electromagnets as well as superconducting (SC) dipoles have been incorporated into the various designs. An overview of the worldwide effort to produce commercial xray sources will be presented. To better illustrate the elements involved in these sources a closer examination of the Superconducting X-ray Lithography Source Project (SXLS) at BNL will be presented.

Citation Download Citation

James B. Murphy "Electron storage rings as x-ray lithography sources: an overview", Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); https://doi.org/10.1117/12.20151

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