Characterizing nanoscale thin-film residual stresses for stress mitigation and engineering in next-generation x-ray optics

Taylor Wood; Hazar Seren; Arthur Woll; Louisa Smieska; Kirt Page; Darren Pagan; Randall L. McEntaffer

doi:10.1117/12.2677465

6 October 2023 Characterizing nanoscale thin-film residual stresses for stress mitigation and engineering in next-generation x-ray optics

Taylor Wood, Hazar Seren, Arthur Woll, Louisa Smieska, Kirt Page, Darren Pagan, Randall L. McEntaffer

Author Affiliations +

Proceedings Volume 12679, Optics for EUV, X-Ray, and Gamma-Ray Astronomy XI; 126790O (2023) https://doi.org/10.1117/12.2677465
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Reflection gratings, are critical components to successful X-ray spectroscopes and represent important priorities for future NASA observatories. As such, significant research efforts have been invested to improve mirror and grating fabrication, resulting in increased collecting area and improved mirror performance. However, residual stresses induced by reflective coatings continue to present challenges, causing mirror deformation, degradation of spectral resolution, and decreased scientific performance. Additionally, stress distributions and the stress response of nanoscale layers (5-30nm) are not well understood and can be difficult to measure. This study demonstrates XRD methods to better characterize and minimize the stress of single and bi-layered reflective thin films at nanoscale thicknesses (5-30 nm) and to more fully understand the stress response of these coatings to deposition conditions. High-Z materials (Pt, Au) have been chosen for this study due to their favorable reflectivity over X-ray wavelengths of interest in the soft X-ray regime.

Conference Presentation

Citation Download Citation

Taylor Wood, Hazar Seren, Arthur Woll, Louisa Smieska, Kirt Page, Darren Pagan, and Randall L. McEntaffer "Characterizing nanoscale thin-film residual stresses for stress mitigation and engineering in next-generation x-ray optics", Proc. SPIE 12679, Optics for EUV, X-Ray, and Gamma-Ray Astronomy XI, 126790O (6 October 2023); https://doi.org/10.1117/12.2677465

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KEYWORDS

Thin films

Engineering

X-ray optics

Coating stress

X-rays

Mirrors

Reflection gratings

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