Influence of temperature on the pull-in characteristics of nano-switches considering surface effect

Fan Yang; Xuyang Wang; Xianlai Song

doi:10.1117/12.3007364

25 October 2023 Influence of temperature on the pull-in characteristics of nano-switches considering surface effect

Fan Yang, Xuyang Wang, Xianlai Song

Proceedings Volume 12801, Ninth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2023); 128010N (2023) https://doi.org/10.1117/12.3007364
Event: Ninth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2023), 2023, Dalian, China

Abstract

Based on the surface energy model, the surface effect is introduced. Through the principle of minimum potential energy, the control equations and boundary conditions of nano-switch considering surface effect, temperature change and temperature correction Casimir force are established. The nonlinear differential equation is solved by homotopy perturbation method. The results show that the increase of temperature will reduce the pull-in voltage of the nano-switch; the surface effect will increase the pull-in voltage of the nano-switch. And as the structure size increases, the pull-in voltage also increases. The Casimir force considering thermal correction will reduce the pull-in voltage, and its influence will increase with the increase of the distance between the two electrodes. Considering the edge effect of the electric field will also reduce the pull-in voltage value. This provides a theoretical basis for further understanding the pull-in characteristics of nano-switch and the design, calibration and application of nano-switch.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Fan Yang, Xuyang Wang, and Xianlai Song "Influence of temperature on the pull-in characteristics of nano-switches considering surface effect", Proc. SPIE 12801, Ninth International Conference on Mechanical Engineering, Materials, and Automation Technology (MMEAT 2023), 128010N (25 October 2023); https://doi.org/10.1117/12.3007364

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