Research and application of micro size measurement technology

Chang'an Hu; Liang Xue; Meng Zhao; Baoquan Hu

doi:10.1117/12.3015200

4 March 2024 Research and application of micro size measurement technology

Chang'an Hu, Liang Xue, Meng Zhao, Baoquan Hu

Proceedings Volume 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023); 129811S (2024) https://doi.org/10.1117/12.3015200
Event: 9th International Symposium on Sensors, Mechatronics, and Automation (ISSMAS 2023), 2023, Nanjing, China

Abstract

In order to verify the applicability of the white light interferometer in the field of micro-nano size measurement. This paper analyzes the application of the white light interferometer in the field of micro-nano size measurement by using four cases, namely, the worn glasses lens, the ruby microsphere, the resolution plate and the solder joint. The measurement results show that the white light interferometer is not only suitable for the traditional roughness and step measurement, but also has a wide range of applications in the measurement and evaluation of micro-scratches, microsphere radius, micro-irregular size area and so on.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chang'an Hu, Liang Xue, Meng Zhao, and Baoquan Hu "Research and application of micro size measurement technology", Proc. SPIE 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023), 129811S (4 March 2024); https://doi.org/10.1117/12.3015200

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