Performance enhancement of amorphous Ga2O3 solar-blind photodetector by chemically etched surface textures

Changqi Zhou; Yunsong Feng; Wei Jin; Youcai Chen; Yuan Lu

doi:10.1117/12.3016326

1 February 2024 Performance enhancement of amorphous Ga₂O₃ solar-blind photodetector by chemically etched surface textures

Changqi Zhou, Yunsong Feng, Wei Jin, Youcai Chen, Yuan Lu

Author Affiliations +

Proceedings Volume 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023); 1306821 (2024) https://doi.org/10.1117/12.3016326
Event: Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 2023, Hefei, China

Abstract

We have demonstrated the fast-speed solar-blind ultraviolet (UV) photodetectors based on amorphous Ga₂O₃ (a-Ga₂O₃) films grown by RF magnetron sputtering. The effect of acid treatment on the performance of a-Ga₂O₃ photodetectors has been investigated in detail. The response speed of the H₂SO₄-treated photodetector is faster than that of the as-grown photodetector, accompanied by a slight decrease in photocurrent. While the responsivity and UV/visible rejection ratio (R250nm/R400nm) of HCl treated photodetector have been significantly improved compared with as-grown photodetector without sacrificing response speed, owing to the groove textures on a-Ga₂O₃ surface etched by HCl, which enhances the absorption of solar-blind UV light in the near surface area of the photodetector. This provides a feasible method for exploring and improving the performance of amorphous gallium oxide ultraviolet detectors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Changqi Zhou, Yunsong Feng, Wei Jin, Youcai Chen, and Yuan Lu "Performance enhancement of amorphous Ga₂O₃ solar-blind photodetector by chemically etched surface textures", Proc. SPIE 13068, Fifth International Conference on Optoelectronic Science and Materials (ICOSM 2023), 1306821 (1 February 2024); https://doi.org/10.1117/12.3016326

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