Development of ultra-lightweight x-ray telescopes fabricated with MEMS technologies for GEO-X

Masaki Numazawa; Yuichiro Ezoe; Kumi Ishikawa; Daiki Ishi; Hiromi Morishita; Yukine Tsuji; Luna Sekiguchi; Takatoshi Murakawa; Yudai Yamada; Rei Ishikawa; Daiki Morimoto; Aoi Ishimure; Shunei Miyauchi; Yuto Ogasawara; Hiroshi Nakajima; Yuki Satoh; Ikuyuki Mitsuishi; Yoshiaki Kanamori; Kohei Morishita; Kazuhisa Mitsuda

doi:10.1117/12.3020669

21 August 2024 Development of ultra-lightweight x-ray telescopes fabricated with MEMS technologies for GEO-X

Masaki Numazawa, Yuichiro Ezoe, Kumi Ishikawa, Daiki Ishi, Hiromi Morishita, Yukine Tsuji, Luna Sekiguchi, Takatoshi Murakawa, Yudai Yamada, Rei Ishikawa, Daiki Morimoto, Aoi Ishimure, Shunei Miyauchi, Yuto Ogasawara, Hiroshi Nakajima, Yuki Satoh, Ikuyuki Mitsuishi, Yoshiaki Kanamori, Kohei Morishita, Kazuhisa Mitsuda

Author Affiliations +

Proceedings Volume 13093, Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray; 130937E (2024) https://doi.org/10.1117/12.3020669
Event: SPIE Astronomical Telescopes + Instrumentation, 2024, Yokohama, Japan

Conference Poster

Abstract

We have been developing ultra-lightweight Wolter type-I X-ray telescopes fabricated with MEMS technologies for GEO-X (GEOspace X-ray imager) which is a small satellite mission to perform soft X-ray imaging spectroscopy of the entire Earth’s magnetosphere. The telescope is our original type of micropore optics and possesses lightness (∼5 g), a short focal length (∼250 mm), and a wide field of view (∼5° × ∼5°). The MEMS X-ray telescope is made of 4-inch Si (111) wafers. The Si wafer is first processed by deep reactive ion etching, which has numerous curvilinear micropores (a 20-μm width) whose sidewalls are utilized as X-ray reflective mirrors. High-temperature hydrogen annealing and chemical mechanical polishing processes are applied to make those sidewalls smooth and flat enough to reflect X-rays. After that, the wafer is plastic-deformed into a spherical shape and Pt-coated by a plasma atomic layer deposition process to focus X-rays with high reflectivity. Finally, we assemble two optics bent with different curvatures (1000- and 333-mm radii) and complete the Wolter type-I telescope. We optimized each process and conducted an X-ray irradiation test to assemble the full-processed optics into an EM telescope for the GEO-X mission, which enabled to complete the telescope to achieve an angular resolution of ∼4.8 arcmin in FWHM in the assembled telescope. We report on our latest development status and the X-ray imaging performance of the GEO-X EM telescope.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Masaki Numazawa, Yuichiro Ezoe, Kumi Ishikawa, Daiki Ishi, Hiromi Morishita, Yukine Tsuji, Luna Sekiguchi, Takatoshi Murakawa, Yudai Yamada, Rei Ishikawa, Daiki Morimoto, Aoi Ishimure, Shunei Miyauchi, Yuto Ogasawara, Hiroshi Nakajima, Yuki Satoh, Ikuyuki Mitsuishi, Yoshiaki Kanamori, Kohei Morishita, and Kazuhisa Mitsuda "Development of ultra-lightweight x-ray telescopes fabricated with MEMS technologies for GEO-X", Proc. SPIE 13093, Space Telescopes and Instrumentation 2024: Ultraviolet to Gamma Ray, 130937E (21 August 2024); https://doi.org/10.1117/12.3020669

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