Paper
18 March 2024 An integrated uni-traveling-carrier photodetector with 3dB bandwidth of over 100GHz
Author Affiliations +
Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131041G (2024) https://doi.org/10.1117/12.3022247
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China
Abstract
The responsivity and the bandwidth are both key parameters of a PD but also encounter tradeoff during the device designing due to the thickness of InGaAs layer absorbing light. In this paper, a balanced structure to achieve both high speed and relatively high responsivity is reported. A uni-traveling carrier PD(UTC-PD) structure is taking advantage of the high drift velocity to meet the rather high-speed exhibition. For responsivity enhancing, we apply back reflector beneath the top-illuminated UTC-PD based on micro transfer printing. To further increase the bandwidth of small size PD, we optimize the shape of CPW electrodes of PDs. With our final structure, the UTC-PD exhibits 3dB bandwidth of 100GHz and responsivity of 0.4A/W.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Yuxuan Wang, Guanyu Li, Xiaowen Gu, Yuechan Kong, and Guang Qian "An integrated uni-traveling-carrier photodetector with 3dB bandwidth of over 100GHz", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131041G (18 March 2024); https://doi.org/10.1117/12.3022247
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KEYWORDS
Doping

Electrodes

Reflectors

Indium gallium arsenide

Metals

Photodetectors

Waveguides

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