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Optical elements are widely used in large optical systems such as laser inertial confinement fusion and astronomical telescopes, but subsurface damage (SSD) generated in the processing of optical components can cause degradation of their performance such as laser damage threshold and imaging quality. Accurate detection of SSDs is necessary to guide the processing of optical components and improve their performance. NDT technology for SSD inspection of optical components based on quantum dots (QDs) tagging breaks through the limitation of traditional NDT process requiring low roughness of optical surfaces and has a broad development prospect in the field of SSD inspection of optical components. Efficient tagging of SSD with QDs can be a key factor to improve the accuracy of SSD detections, but there is a lack of research on how to efficiently tag SSDs with QDs. To solve the above problems, this paper proposes a nondestructive detection technique for SSD of optical components based on high efficiency tagging of CQDs. Firstly, we analyze the characteristics of optical component processing and quantum dot-based detection technology, and determine the factors affecting the effect of QDs on the labeling of optical component SSDs. The effects of different factors on QDs-labeled SSDs were analyzed according to the distribution and fluorescence intensity of SSDs. The results showed that: (1) the changes of pressure and temperature during the process did not have significant effects on the fluorescence properties of CQDs; (2) the excitation wavelength, fluorescence emission peak, solution concentration, solution dose, excitation light power and the pH of the environment in which CQDs are located have certain effects on their fluorescence properties and SSD tagging results. This study provides a useful reference for the efficient labeling and accurate detection of optical components SSD.
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