Ellipsometry with far-infrared lasers

Karl Barth; Fritz Keilmann

doi:10.1117/12.22076

1 October 1990 Ellipsometry with far-infrared lasers

Karl Barth, Fritz Keilmann

Proceedings Volume 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray; (1990) https://doi.org/10.1117/12.22076
Event: Polarimetry '90, 1990, Huntsville, AL, United States

Abstract

A rotating analyzer ellipsometer for the far-infrared wavelength range from 30 to 1200 microns has been developed. The instrument uses well-collimated radiation from a step-tunable CW gas laser source. Wire-grid polarizers are employed which give a polarization purity of 10,000:1. To test the instrument, the birefringence of crystal quartz was measured in transmission. Applications are in the characterization of semiconductors and of high-Tc superconductors.

Citation Download Citation

Karl Barth and Fritz Keilmann "Ellipsometry with far-infrared lasers", Proc. SPIE 1317, Polarimetry: Radar, Infrared, Visible, Ultraviolet, and X-Ray, (1 October 1990); https://doi.org/10.1117/12.22076

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