Design and analysis of high-resolution confocal measurement systems

Tian Wang; Jiayu Ru; Xueliang Zhu

doi:10.1117/12.3031620

18 July 2024 Design and analysis of high-resolution confocal measurement systems

Tian Wang, Jiayu Ru, Xueliang Zhu

Proceedings Volume 13179, International Conference on Optics and Machine Vision (ICOMV 2024); 131791K (2024) https://doi.org/10.1117/12.3031620
Event: International Conference on Optics and Machine Vision (ICOMV 2024), 2024, Nanchang, China

Abstract

With the wide application of large-diameter optical components, the measurement efficiency of single-point chromatic confocal system is very low, which cannot complete the detection of surface defects of large-diameter optical components efficiently. Line-scanning chromatic confocal technology has been widely used because of its ability to achieve fast and low time-consuming measurements. This study designs and analyzes a line-scanning confocal system for optical component defects based on the principle of chromatic confocal. Firstly, the basic principle of the line-scanning chromatic confocal system is elaborated; secondly, the dispersive objective in the measurement system are designed, enables the system to realize high-precision, wide-range measurements; the theoretical analysis results show that the axial resolution of the system can reach 0.5 μm, which provides certain technical support for the detection of defects on the surface of sub-micron optical components.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Tian Wang, Jiayu Ru, and Xueliang Zhu "Design and analysis of high-resolution confocal measurement systems", Proc. SPIE 13179, International Conference on Optics and Machine Vision (ICOMV 2024), 131791K (18 July 2024); https://doi.org/10.1117/12.3031620

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