High-precision, miniaturized FBG gas flow sensor

Zekai Li; Xinglin Tong; Lei Cheng; Fanchao Zeng; Xiuwen Hong; Te Zhang

doi:10.1117/12.3033035

5 July 2024 High-precision, miniaturized FBG gas flow sensor

Zekai Li, Xinglin Tong, Lei Cheng, Fanchao Zeng, Xiuwen Hong, Te Zhang

Proceedings Volume 13184, Third International Conference on Electronic Information Engineering and Data Processing (EIEDP 2024); 131840M (2024) https://doi.org/10.1117/12.3033035
Event: 3rd International Conference on Electronic Information Engineering and Data Processing (EIEDP 2024), 2024, Kuala Lumpur, Malaysia

Abstract

This paper designs and makes a high precision and miniature fiber Bragg grating (FBG) gas flow sensor for the low measurement accuracy and large volume of traditional electromagnetic flow sensor in complex working environment. The flow sensor is selected, and the high ratio diameter nozzle is used as the throttle element to produce the pressure difference on both sides of the nozzle. By pasting the FBG along the radial direction on the sensitive diaphragm, the deformation caused by the induction diaphragm due to the pressure difference, so as to associate the flow change with the FBG wavelength drift. The mathematical relationship between the measured gas flow and FBG wavelength values is derived from theoretical and simulation, and the dynamic flow characteristics of the flow sensor are obtained through experimental calibration. The experimental results show that the flow change and FBG wavelength drift, consistent with the theoretical analysis, the flow sensor dynamic flow measurement sensitivity is 11.04 NL/min. The FBG gas flow sensor designed in this paper has the advantages of high precision, miniaturization, strong anti-electromagnetic interference ability and easy integration in the complex working environment.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zekai Li, Xinglin Tong, Lei Cheng, Fanchao Zeng, Xiuwen Hong, and Te Zhang "High-precision, miniaturized FBG gas flow sensor", Proc. SPIE 13184, Third International Conference on Electronic Information Engineering and Data Processing (EIEDP 2024), 131840M (5 July 2024); https://doi.org/10.1117/12.3033035

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