Development and application of SEBS mounted on EUV mask blank

Asheesh Nautiyal

doi:10.1117/12.3034688

13 November 2024 Development and application of SEBS mounted on EUV mask blank

Asheesh Nautiyal

Proceedings Volume 13216, Photomask Technology 2024; 1321612 (2024) https://doi.org/10.1117/12.3034688
Event: SPIE Photomask Technology + EUV Lithography, 2024, Monterey, California, United States

Abstract

The reticle is not firmly fastened inside the EUV pod. So, during transport and handling, the EUV pod and subjected to vibrations. This can damage thin film coatings and pollute the EUV mask. In this situation, a SEBS (smart EUV blank sensor) is very useful. A SEBS comes with a group of specialized sensors such as vibration, level, and temperature to improve the vibration during transport and handling of the EUV mask blank.

Conference Presentation

Citation Download Citation

Asheesh Nautiyal "Development and application of SEBS mounted on EUV mask blank", Proc. SPIE 13216, Photomask Technology 2024, 1321612 (13 November 2024); https://doi.org/10.1117/12.3034688

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