Paper
8 November 2024 Free-space and solid-matrix-media diffraction neural network masks made by two-photon lithography
Author Affiliations +
Abstract
Neural networks are powerful tools for solving many modern problems. One of the options for the optical implementation of a neural network is a diffraction neural network, which consists of one or several layers of different-sized pixels on which radiation diffracts. The pixel parameters are tightly bound with the desired radiation wavelength. In this work, we printed masks for diffraction neural networks for the optical range using two-photon laser lithography. Applying coordinate stabilization approach and preserving temperature and humidity allowed to print pixels with up to 10 nm height difference and 2.3 nm average surface roughness.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Tigran G. Baluian, Daryana I. Pechkurova, Anna V. Konovalova, Anna A. Popkova, and Andrey A. Fedyanin "Free-space and solid-matrix-media diffraction neural network masks made by two-photon lithography", Proc. SPIE 13234, Advanced Laser Processing and Manufacturing VIII, 132340A (8 November 2024); https://doi.org/10.1117/12.3036029
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KEYWORDS
Photomasks

Printing

Diffraction

Neural networks

Lithography

Solids

Photoresist materials

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