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Three kinds of deposition methods : ECR ( Electron Cycloiron Resonance ) sputtering, Ion Beam Sputtering (IBS)
and conventional Vacuum Evaporation (VE) are compared to obtain highly reflective X-ray mirrors. ECR sputtered
platinum film shows the highest X-ray reflectivity, because it exhibits the smallest surface roughness, a. The surface
roughness and morphology of Pt films are investigated using SEM, STM and X-ray reflectivity measurements. The
surface roughness of VE films is more than 0.8 nm. ECR and lBS films have optimum thicknesses which yield
minimum surface roughness. The minimum surface roughness of the ECR film is 0.30 nm and X-ray reflectivity of this
film does not vary before and after baking ( 250°C x 40 hours). ECR sputtered film is therefore the best one for
preparing high quality X-ray mirrors.
Sei-ichi Itabashi,Ikuo Okada,Takashi Kaneko,Seitaro Matsuo, andHideo Yoshihara
"Platinum coating of an x-ray mirror for SR lithography", Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22813
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Sei-ichi Itabashi, Ikuo Okada, Takashi Kaneko, Seitaro Matsuo, Hideo Yoshihara, "Platinum coating of an x-ray mirror for SR lithography," Proc. SPIE 1333, Advanced Optical Manufacturing and Testing, (1 November 1990); https://doi.org/10.1117/12.22813