Ultraprecise scanning technology

Frits Zernike; Daniel N. Galburt

doi:10.1117/12.23196

1 February 1991 Ultraprecise scanning technology

Frits Zernike, Daniel N. Galburt

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23196
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The extension of present step and scan technology to EUV projection techniques to print patterns with .ljim feature sizes is examined.

Citation Download Citation

Frits Zernike and Daniel N. Galburt "Ultraprecise scanning technology", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23196

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