Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices

Bruce L. Booth; James L. Hohman; Kenneth B. Keating; Joseph E. Marchegiano; Sandy L. Witman

doi:10.1117/12.25024

1 March 1991 Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices

Bruce L. Booth, James L. Hohman, Kenneth B. Keating, Joseph E. Marchegiano, Sandy L. Witman

Proceedings Volume 1377, Excimer Laser Materials Processing and Beam Delivery Systems; (1991) https://doi.org/10.1117/12.25024
Event: Advances in Intelligent Robotics Systems, 1990, Boston, MA, United States

Abstract

The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating slots for passive alignment of optical fibers to planar channel waveguides as well as for direct waveguide-to-waveguide coupling. This paper describes KrF excimer laser generation of passive alignment coupling slots and the results achieved using this technique with Polyguid polymeric integrated optic system single and multimode waveguide coupling.

Citation Download Citation

Bruce L. Booth, James L. Hohman, Kenneth B. Keating, Joseph E. Marchegiano, and Sandy L. Witman "Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices", Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); https://doi.org/10.1117/12.25024

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available