Laser systems for precision micromachining

Marian Nowicki; Zygmunt J. Niechoda

doi:10.1117/12.57149

1 August 1991 Laser systems for precision micromachining

Marian Nowicki, Zygmunt J. Niechoda

Proceedings Volume 1391, Laser Technology III; (1991) https://doi.org/10.1117/12.57149
Event: Laser Technology III, 1990, Szczecin, Poland

Abstract

Two systems for laser precision micrornachining and some results of their work. are presented in this paper. These systems were de signed and constructed in the Institute of Microelectronics and Optoelectronics of Warsaw University of Technology.

Citation Download Citation

Marian Nowicki and Zygmunt J. Niechoda "Laser systems for precision micromachining", Proc. SPIE 1391, Laser Technology III, (1 August 1991); https://doi.org/10.1117/12.57149

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