Nonlinear effects in hidden picture amplification and contrast improvement in polymer electron and Roentgenoresist PMMA

A. P. Aleksandrov; Vladimir N. Genkin; M. Yu. Myl'nikov; Nikolay V. Rukhman

doi:10.1117/12.48182

1 December 1991 Nonlinear effects in hidden picture amplification and contrast improvement in polymer electron and Roentgenoresist PMMA

A. P. Aleksandrov, Vladimir N. Genkin, M. Yu. Myl'nikov, Nikolay V. Rukhman

Author Affiliations +

Proceedings Volume 1440, Optical Radiation Interaction with Matter; (1991) https://doi.org/10.1117/12.48182
Event: Optical Radiation Interaction with Matter, 1990, Leningrad, Russian Federation

Abstract

Some aspects of the laser light-polymer resist interaction are discussed. A possible way to increase the sensitivity and contrast is shown. 1. The laser chemicai technologies are widely used in indust- ryfi]. Here we analyze the laser capabilities of solving some elect- ron and roentgenolitography problems. It is shown, that the problems of polymer resist low sensitivity and contrast can be solved by light modification [2, 3].

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A. P. Aleksandrov, Vladimir N. Genkin, M. Yu. Myl'nikov, and Nikolay V. Rukhman "Nonlinear effects in hidden picture amplification and contrast improvement in polymer electron and Roentgenoresist PMMA", Proc. SPIE 1440, Optical Radiation Interaction with Matter, (1 December 1991); https://doi.org/10.1117/12.48182

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