Design of stiff, low-vibration floor structures

Hal Amick; Steven G. Hardash; Paul E. Gillett; Ronald J. Reaveley

doi:10.1117/12.56837

1 February 1992 Design of stiff, low-vibration floor structures

Hal Amick, Steven G. Hardash, Paul E. Gillett, Ronald J. Reaveley

Proceedings Volume 1619, Vibration Control in Microelectronics, Optics, and Metrology; (1992) https://doi.org/10.1117/12.56837
Event: SPIE Technical: OPTCON '91, 1991, San Jose, CA, United States

Abstract

Many aspects must be considered in the design of low-vibration buildings. One major aspect is the floor supporting the vibration-sensitive equipment. This paper addresses the design of several types of floors for low-vibration environments, drawing from some of the authors'' design projects.

Citation Download Citation

Hal Amick, Steven G. Hardash, Paul E. Gillett, and Ronald J. Reaveley "Design of stiff, low-vibration floor structures", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56837

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