Back-illuminated 2048 x 2048 charge-coupled device performance

Kristie Werner Gladhill; Morley Blouke; Pauline Marriott; Thomas G. Houck; Brian L. Corrie; Harry H. Marsh

doi:10.1117/12.135933

12 August 1992 Back-illuminated 2048 x 2048 charge-coupled device performance

Kristie Werner Gladhill, Morley Blouke, Pauline Marriott, Thomas G. Houck, Brian L. Corrie, Harry H. Marsh

Proceedings Volume 1656, High-Resolution Sensors and Hybrid Systems; (1992) https://doi.org/10.1117/12.135933
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

This paper will discuss recent performance of the back illuminated 2048 x 2048 imaging array device. The TK2048E chargecoupled device (CCD) full frame imnager is a three phase polysilicon gate buried channel device utilizing mini channel and multi-pinned phase technology. Physical structure allows simultaneous readout of each 1024 x 1024 quadrant or read out of the entire array through any one of four identical output NOSFETs. Test results for noise gain dark current charge transfer efficiency full well dark and hot defects quantum efficiency and imaging will be reviewed. 1.

Citation Download Citation

Kristie Werner Gladhill, Morley Blouke, Pauline Marriott, Thomas G. Houck, Brian L. Corrie, and Harry H. Marsh "Back-illuminated 2048 x 2048 charge-coupled device performance", Proc. SPIE 1656, High-Resolution Sensors and Hybrid Systems, (12 August 1992); https://doi.org/10.1117/12.135933

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