Scanning confocal microscope for accurate dimensional measurement

Steven E. Mechels; Matthew Young

doi:10.1117/12.59541

26 June 1992 Scanning confocal microscope for accurate dimensional measurement

Steven E. Mechels, Matthew Young

Proceedings Volume 1660, Biomedical Image Processing and Three-Dimensional Microscopy; (1992) https://doi.org/10.1117/12.59541
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

We have improved and evaluated a scanning confocal microscope for the precise measurement of optical fiber cladding diameter. In particular, we have studied the systematic error that results from a finite detector aperture and concluded that the diameter of that aperture must be less than one-half the radius of the Airy disk in the detector plane. We compared our measurements with a chrome-on-glass standard reference material provided by NIST- Gaithersburg and with optical fibers that were measured with a contact micrometer. We estimate the overall uncertainty of our measurements to be around +/- 50 nm.

Citation Download Citation

Steven E. Mechels and Matthew Young "Scanning confocal microscope for accurate dimensional measurement", Proc. SPIE 1660, Biomedical Image Processing and Three-Dimensional Microscopy, (26 June 1992); https://doi.org/10.1117/12.59541

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