Refractive-index and thickness measurements for an anisotropic film by S- and P-polarized reflectances

Tami Kihara; Kiyoshi Yokomori

doi:10.1117/12.138796

11 December 1992 Refractive-index and thickness measurements for an anisotropic film by S- and P-polarized reflectances

Tami Kihara, Kiyoshi Yokomori

Proceedings Volume 1746, Polarization Analysis and Measurement; (1992) https://doi.org/10.1117/12.138796
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A new technique is proposed for determining the refractive index and thickness of anisotropic films. Suppose the film is aligned in the X-Y plane, and that the plane of incidence includes the X-axis. From the reflectances of S- and P- polarized light, the principal refractive indices n_x, n_y, and n_z can be obtained along with the film thickness d. First, n_y and d can be derived from the S-polarized reflectance, since the S-polarization is parallel to the Y- axis. It is also possible to derive n_x in the same way. The P-polarization is in the X-Z plane and Fresnel equations for P-polarization are expressed by n_x, n_z, and d. Therefore, n_z can be determined using the P-polarized reflectance and the values already calculated for n_x and d. Trial measurements are made on a Sol-Gel derived LiNbO₃ film on an Al₂O₃ substrate, using a system with a reflectance measurement accuracy of the order of 0.01%. The values obtained for n_y (equals n_x), n_z and d are 1.980, 2.056, and 107.5 nm, respectively. According to the results of this simulation, the accuracy of the obtained values can be estimated as < 0.3%.

Citation Download Citation

Tami Kihara and Kiyoshi Yokomori "Refractive-index and thickness measurements for an anisotropic film by S- and P-polarized reflectances", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); https://doi.org/10.1117/12.138796

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