Device modeling for high-speed three-dimensional CMOS/SOI integrated circuits

Konstantin O. Petrosjanc; Maria V. Sicheva

doi:10.1117/12.130999

1 August 1992 Device modeling for high-speed three-dimensional CMOS/SOI integrated circuits

Konstantin O. Petrosjanc, Maria V. Sicheva

Proceedings Volume 1783, International Conference of Microelectronics: Microelectronics '92; (1992) https://doi.org/10.1117/12.130999
Event: International Conference on Microelectronics, 1992, Warsaw, Poland

Abstract

The physical effects in SOI MOSFETs such as the floating substrate regime in `thick' film, accumulation of excess holes in `thick' and `thin' film for the negative voltage at the back gate, the influence of the fixed surface charges at the front and back interface Si-SiO₂ are investigated using two-dimensional numerical simulation. The dependence of the current- voltage characteristics of SOI MOSFET on the physical and technological parameters are analyzed. Some specific effects such as kink-effect, histeresis of drain characteristics, drain current overshoot, and their dependences on the switching speed are investigated. It is shown that thin film SOI devices with excluding floating substrate effects must be used for high speed VLSI. The switching characteristics of the different construction of the SOI/CMOS structures are simulated and compared. It is shown that thin film 3-D SOI/CMOS make a good choice for high speed VLSI.

Citation Download Citation

Konstantin O. Petrosjanc and Maria V. Sicheva "Device modeling for high-speed three-dimensional CMOS/SOI integrated circuits", Proc. SPIE 1783, International Conference of Microelectronics: Microelectronics '92, (1 August 1992); https://doi.org/10.1117/12.130999

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available