Energy-efficient optical system for excimer laser ablation apparatus

Nobuyuki Zumoto; Masao Izumo; Toshinori Yagi; Yasuhito Myoi; Masaaki Tanaka

doi:10.1117/12.148395

7 August 1993 Energy-efficient optical system for excimer laser ablation apparatus

Nobuyuki Zumoto, Masao Izumo, Toshinori Yagi, Yasuhito Myoi, Masaaki Tanaka

Proceedings Volume 1869, Intracavity and Extracavity Control of Laser Beam Properties; (1993) https://doi.org/10.1117/12.148395
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States

Abstract

To improve the capabilities of excimer laser ablation processing apparatus, we have been developing an innovative Multiple Irradiation Optical System (multiple irradiator). In this system, we placed a reflector opposite the mask, and used a mask with a highly reflective coating. The laser beams therefore irradiate the mask repeatedly, and we can use the laser energy more efficiently than conventional optical systems. The experimental results show that our system is 12 times more energy efficient than the conventional optical systems. Also, we have made a prototype excimer laser material processing apparatus with the multiple irradiator, which is suitable for drilling viaholes of less than 100 micrometers diameters such as viaholes of print circuit boards. The processing speed is less than 1 minute when the material is 100 mm X 100 mm wide and 25 micrometers thicknesses polyimide film, and the laser energy is 40 mJ/shot with 600 Hz frequency.

Citation Download Citation

Nobuyuki Zumoto, Masao Izumo, Toshinori Yagi, Yasuhito Myoi, and Masaaki Tanaka "Energy-efficient optical system for excimer laser ablation apparatus", Proc. SPIE 1869, Intracavity and Extracavity Control of Laser Beam Properties, (7 August 1993); https://doi.org/10.1117/12.148395

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