Paper
8 September 1993 Improving transverse actuation of piezoceramics using interdigitated surface electrodes
Nesbitt W. Hagood, R. Kindel, Kamyar Ghandi, Paolo Gaudenzi
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Abstract
The possibility of using interdigitated surface electrode patterns to improve the transverse actuation capability of electroceramic actuators is investigated. This pattern produces nonuniform electrical fields in the plane of the wafer which utilize the longitudinal piezoelectric effect to generate larger, more anisotropic planar actuation than conventional piezoelectric devices. Analytical models are developed for a representative electroceramic volume element of a piezoelectric wafer with interdigitated electrodes. These models incorporate full electromechanical coupling through the constitutive relations and are solved using approximate energy methods. The analytical models are compared to piezoelectric finite element solutions. The analysis predicts a range of electrode thickness and spacings which can increase the achievable transverse actuation. An experimental program was performed to validate the analytical results. The experimental results verified the analytical prediction of highly orthotropic large magnitude in plane strains.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nesbitt W. Hagood, R. Kindel, Kamyar Ghandi, and Paolo Gaudenzi "Improving transverse actuation of piezoceramics using interdigitated surface electrodes", Proc. SPIE 1917, Smart Structures and Materials 1993: Smart Structures and Intelligent Systems, (8 September 1993); https://doi.org/10.1117/12.152766
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CITATIONS
Cited by 105 scholarly publications and 2 patents.
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KEYWORDS
Electrodes

Semiconducting wafers

Actuators

Intelligence systems

Finite element methods

Smart structures

Piezoelectric effects

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