Thresholds for surface imperfections

L. R. Baker

doi:10.1117/12.2308799

23 July 1993 Thresholds for surface imperfections

L. R. Baker

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983AK (1993) https://doi.org/10.1117/12.2308799
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

We report on the fabrication and measurement of refractive microlens arrays in photoresist. The production steps are shown in detail. A novel " base layer " technique is described which makes it possible to fabricate lower numerical apertures lenses in resist. The processing of melted microlens arrays starts with cylindrical islands of resist on a glass substrate. After the development in a wet chemical process the cylinders are melted on a hot plate. The surface tension forms the liquid into spherical shape which can be used as a microlens. The lens shape depends on the critical angle between the substrate and the resist at the circumference of the lens. The wave aberrations were measured in a Mach - Zehnder interferometer with phase shift capability. Based on the measurements point spread function and modulation transfer function are determined.

Citation Download Citation

L. R. Baker "Thresholds for surface imperfections", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983AK (23 July 1993); https://doi.org/10.1117/12.2308799

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available