Interface roughness characterization using x-ray standing waves

Tomoaki Kawamura; Hisataka Takenaka

doi:10.1117/12.167228

1 February 1994 Interface roughness characterization using x-ray standing waves

Tomoaki Kawamura, Hisataka Takenaka

Proceedings Volume 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II; (1994) https://doi.org/10.1117/12.167228
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

An X-ray standing wave technique was used to characterize the interface roughness of multilayer structures. Standing wave fields of X-rays in multilayers are described in terms of a modified optical matrix. To include the interface roughness effect, Fresnel reflectance and transmittance coefficients in the matrix were modified. A Ni/C multilayer with about 54 angstroms periods was analyzed by X-ray diffraction and by the X-ray standing wave technique. The ratio between second and third Bragg reflection peaks suggested an expansion of nickel layer thickness. The X-ray standing wave measurement showed a reduction of nickel layer density, suggesting the diffusion of nickel atoms and formation of nickel-carbon complex. Interface roughness was estimated to be about 10 angstroms from the calculation at 85% bulk density of nickel, suggesting the diffusion of nickel.

Citation Download Citation

Tomoaki Kawamura and Hisataka Takenaka "Interface roughness characterization using x-ray standing waves", Proc. SPIE 2011, Multilayer and Grazing Incidence X-Ray/EUV Optics II, (1 February 1994); https://doi.org/10.1117/12.167228

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