Two-dimensional-SROP-1: optical profiler for surface-roughness measurement

Chong Liu; Zhu Li; Jiabi Chen

doi:10.1117/12.156458

22 September 1993 2D-SROP-1: optical profiler for surface-roughness measurement

Chong Liu, Zhu Li, Jiabi Chen

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156458
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A new optical profiler for surface roughness measurement developed by the authors is described in this paper. Based on an analyses of phase shifting error in phase shifting interferiietry a new algorithm for eliminating the effect of the error is presented. The experiments show that the development of this instrument is successful and it has a vertical resolution of 1 nni lateral resolution of 0. 42 Itm and a repeatability of Ra 0. 6 nni.

Citation Download Citation

Chong Liu, Zhu Li, and Jiabi Chen "2D-SROP-1: optical profiler for surface-roughness measurement", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156458

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