Spectroscopic ellipsometry of undulated, bonded silicon-on-insulator structures with oxide-nitride-oxide layers

Magdi Ezzat El-Ghazzawi; Tadashi Saitoh

doi:10.1117/12.176854

26 May 1994 Spectroscopic ellipsometry of undulated, bonded silicon-on-insulator structures with oxide-nitride-oxide layers

Magdi Ezzat El-Ghazzawi, Tadashi Saitoh

Author Affiliations +

Proceedings Volume 2141, Spectroscopic Characterization Techniques for Semiconductor Technology V; (1994) https://doi.org/10.1117/12.176854
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Undulated bonded silicon-on-insulator structures with oxide/nitride/oxide layers are investigated nondestructively using spectroscopic ellipsometry. Optimum measured information for a wavelength range of 250 to 850 NM has been obtained by using a combination of a lens and nearly 1 mm slit width to minimize the light beam divergence. Using Marquardt regression analysis, slight vertical discrepancy is till observed between measured and calculated data, especially in the wavelength range of 250 to 285 nm due to the still unavoidable existing of beam divergence. This problem affects the accuracy of evaluated layer thicknesses from position to position on the investigated samples, especially the uppermost very thin (1 nm) oxide layer thickness. One interesting result is that because of the observed vertical error in the measured data, we have to avoid in this case making fitting on tan (Psi) and cos (Delta) in order to obtain best calculated data close to the nominal values.

Citation Download Citation

Magdi Ezzat El-Ghazzawi and Tadashi Saitoh "Spectroscopic ellipsometry of undulated, bonded silicon-on-insulator structures with oxide-nitride-oxide layers", Proc. SPIE 2141, Spectroscopic Characterization Techniques for Semiconductor Technology V, (26 May 1994); https://doi.org/10.1117/12.176854

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available