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Laser ablation of layer structures made of optically and thermally dissimilar materials is markedly different from ablation of homogeneous bulk materials. In the case of supported thin films the ablation characteristics are influenced by the variation of the material properties at the interface. This concept is highlighted by comparing experimental and thermal calculation data on pulsed laser ablation of metal, tin oxide and indium-tin oxide films from glass support to those of characterizing bulk ablation.
Tamas Szoerenyi,Zoltan Kantor, andLucien Diego Laude
"Unusual features of laser ablation of supported thin films", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184767
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Tamas Szoerenyi, Zoltan Kantor, Lucien Diego Laude, "Unusual features of laser ablation of supported thin films," Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184767